Pembuatan Sel Surya Film Tipis dengan DC Magnetron Sputtering
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Abstract
material semikonduktor untuk mengubah cahaya matahari secara langsung menjadi listrik.
Semakin meningkatnya permintaan akan sumber energi terbarukan, maka pembuatan sel
surya menjadi sangat penting. Pembuatan sel surya dengan DC Magneton Sputtering mampu
menghasilkan performansi yang bagus. Lapisan tipis sel surya dibuat dari sambungan p-n
silikon dengan kombinasi multilayer Ag / SiB / SiP dan dideposisi oleh DC Magnetron
Sputtering secara bertahap. Deposisi layer SiB dan SiP dengan memperhatikan parameter
tekanan chamber sebesar 6 x 10-8 mbar, tekanan gas Argon 2 x 10-2 mbar, dan waktu
deposisi SiB and SiP selama 16 menit dan 10 menit. Arus dan tegangan dari lapisan tipis sel
surya yang telah difabrikasi, selanjutnya diuji dengan rangkaian seri dan paralel, kemudian
dianalisis menggunakan program Logger Pro 3.8. Hasil kurva tampilan program sesuai
dengan kurva karakteristik dioda. Efisiensi untuk sel surya tanpa kombinasi rangkaian adalah
sebesar 6.02%, dengan rangkaian seri sebesar 11.929% dan 8.737% untuk rangkaian paralel.
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